The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

Provides complete and up-to-date coverage of the foundational principles, enabling technologies, and specific instruments of portable spectrometry Portable Spectroscopy and Spectrometry: Volume One is both a timely overview of the miniature technologies used in spectrometry, and an authoritative guide to the specific instruments employed in a wide range of disciplines. This much-needed resource is the first comprehensive work to describe the enabling technologies of portable spectrometry, explain how various handheld and portable instruments work, discuss their potential limitations, and provide clear guidance on optimizing their utility and accuracy in the field. In-depth chapters—written by a team of international authors from a wide range of disciplinary backgrounds—have been carefully reviewed both by the editors and by third-party experts to ensure their quality and completeness. Volume One begins with general discussion of portable spectrometer engineering before moving through the electromagnetic spectrum to cover x-ray fluorescence (XRF), UV-visible, near-infrared, mid-infrared, and Raman spectroscopies. Subsequent chapters examine microplasmas, laser induced breakdown spectroscopy (LIBS), nuclear magnetic resonance (NMR) spectroscopy, and a variety of portable mass spectrometry instrument types. Featuring detailed chapters on DNA instrumentation and biological analyzers—topics of intense interest in light of the global coronavirus pandemic—this timely volume: Provides comprehensive coverage of the principles and instruments central to portable spectroscopy Includes contributions by experienced professionals working in instrument companies, universities, research institutes, the military, and hazardous material teams Discusses special topics such as smartphone spectroscopy, optical filter technology, stand-off detection, and MEMS/MOEMS technology Covers elemental spectroscopy, optical molecular spectroscopy, mass spectrometry, and molecular and imaging technologies Portable Spectroscopy and Spectrometry: Volume One is an indispensable resource for developers of portable instruments, civilian and government purchasers and operators, and teachers and students of portable spectroscopy. When combined with Volume Two, which focuses on the multitude of applications of portable instrumentation, Portable Spectroscopy and Spectrometry provides the most thorough coverage of the field currently available.

Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). It is useful as a professional reference, technology user's guide, and as a textbook.

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

As in the First Edition, each chapter in this new Second Edition is authored by one or more acknowledged experts and then carefully edited to ensure a consistent level of quality and approach throughout. There are new chapters on passive devices, RF and microwave packaging, electronic package assembly, and cost evaluation and assembly, while organic and ceramic substrates are now covered in separate chapters. All the hallmarks of the First Edition, which became an industry standard and a popular graduate-level textbook, have been retained. An Instructor's Manual presenting detailed solutions to all the problems in the book is available upon request from the Wiley Makerting Department.

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

This comprehensive reference text discusses advance concepts and applications in the field of nanotechnology. The text presents a detailed discussion of key important concepts including nanomaterials and nanodevices, nano-bio interface, nanoscale memories, and semiconductor nanotechnology. It discusses applications of nanotechnology in the fields of aerospace engineering, cosmetic industry, pharmaceutical science, food industry, and the textile industry. The text will be useful for senior undergraduate and graduate students in the field of electrical engineering, electronics engineering, nanotechnology, and pharmaceutical science. Discussing fundamental, advanced concepts and their applications in a single volume, this text will be useful as a reference text for senior undergraduate and graduate students in the field of electrical engineering, electronics engineering, nanotechnology, and pharmaceutical science. It comprehensively discusses important concepts such as nano-robotics, carbon-based nanomaterials, and nanoscale memories. The text discusses advanced concepts of nanotechnology and its applications in the fields of textile, pharmaceutical sciences, aerospace, and food industry. It will be an ideal reference text for senior undergraduate and graduate students in the field of electrical engineering, electronics engineering, nanotechnology, and nanoscience.