This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

This issue of ECS Transactions covers emerging materials, process and technology options for large-area silicon wafers to enhance advanced IC performance or to enable revolutionary device structures with entirely new functionalities. Topics : high-mobility channel materials, (e.g. strained Si/Ge, compound semiconductors and graphene), high-performance gate stacks and low-resistivity junctions and contacts on new, Si-compatible materials; new materials and processes for 3-D (TSV) integration ; synthesis of nano-structures including wires, pores and membranes of Si-compatible materials; novel MEMS/NEMS structures and their integration with the mainstream Si-IC technology.

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Now in its third edition, this bestselling work continues to offer state-of-the-art information on the development and employment of capillary electrophoresis. With special emphasis on microseparations and microfluidics, it features new chapters describing the use of microchip electrophoresis and associated microtechniques, with a focus on the extraordinary breadth of work undertaken to expand CE methodologies in recent years. Enhanced by contributions from leading international experts, the Handbook of Capillary and Microchip Electrophoresis and Associated Microtechniques, Third Edition remains a seminal reference for the chemistry, biology, and engineering fields.

The Handbook of Chemical and Biological Sensors focuses on the development of sensors to recognize substances rather than physical quantities. This fully inclusive book examines devices that use a biological sensing element to detect and measure chemical and biological species as well as those that use a synthetic element to achieve a similar result. A first port of call for anyone with a specific interest, question, or problem relating to this area, this comprehensive source of reference serves as a guide for practicing scientists and as a text for many graduate courses. It presents relevant physics to chemists, chemistry to materials scientists, materials science to electronic engineers, and fabrication technology to all of the above. In addition, the handbook is useful both to newcomers and to experienced researchers who wish to broaden their knowledge of the constituent disciplines of this wide-ranging field.

Comprehensively covers the key technologies for the development of tactile perception in minimally invasive surgery Covering the timely topic of tactile sensing and display in minimally invasive and robotic surgery, this book comprehensively explores new techniques which could dramatically reduce the need for invasive procedures. The tools currently used in minimally invasive surgery (MIS) lack any sort of tactile sensing, significantly reducing the performance of these types of procedures. This book systematically explains the various technologies which the most prominent researchers have proposed to overcome the problem. Furthermore, the authors put forward their own findings, which have been published in recent patents and patent applications. These solutions offer original and creative means of surmounting the current drawbacks of MIS and robotic surgery. Key features:- Comprehensively covers topics of this ground-breaking technology including tactile sensing, force sensing, tactile display, PVDF fundamentals Describes the mechanisms, methods and sensors that measure and display kinaesthetic and tactile data between a surgical tool and tissue Written by authors at the cutting-edge of research into the area of tactile perception in minimally invasive surgery Provides key topic for academic researchers, graduate students as well as professionals working in the area

Learning on Silicon combines models of adaptive information processing in the brain with advances in microelectronics technology and circuit design. The premise is to construct integrated systems not only loaded with sufficient computational power to handle demanding signal processing tasks in sensory perception and pattern recognition, but also capable of operating autonomously and robustly in unpredictable environments through mechanisms of adaptation and learning. This edited volume covers the spectrum of Learning on Silicon in five parts: adaptive sensory systems, neuromorphic learning, learning architectures, learning dynamics, and learning systems. The 18 chapters are documented with examples of fabricated systems, experimental results from silicon, and integrated applications ranging from adaptive optics to biomedical instrumentation. As the first comprehensive treatment on the subject, Learning on Silicon serves as a reference for beginners and experienced researchers alike. It provides excellent material for an advanced course, and a source of inspiration for continued research towards building intelligent adaptive machines.