The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

The second edition of this standard-setting handbook provides and all-encompassing reference for the practicing engineer in industry, government, and academia, with relevant background and up-to-date information on the most important topics of modern mechanical engineering. These topics include modern manufacturing and design, robotics, computer engineering, environmental engineering, economics, patent law, and communication/information systems. The final chapter and appendix provide information regarding physical properties and mathematical and computational methods. New topics include nanotechnology, MEMS, electronic packaging, global climate change, electric and hybrid vehicles, and bioengineering.

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

The CRC Handbook of Thermal Engineering, Second Edition, is a fully updated version of this respected reference work, with chapters written by leading experts. Its first part covers basic concepts, equations and principles of thermodynamics, heat transfer, and fluid dynamics. Following that is detailed coverage of major application areas, such as bioengineering, energy-efficient building systems, traditional and renewable energy sources, food processing, and aerospace heat transfer topics. The latest numerical and computational tools, microscale and nanoscale engineering, and new complex-structured materials are also presented. Designed for easy reference, this new edition is a must-have volume for engineers and researchers around the globe.

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

While researchers work overtime to create new technologies and methods of providing energy, it is critical that modern industry makes the most efficient use of the energy that is currently available. The Energy Management and Conservation Handbook offers expert guidance on the planning and design of “green” technologies. It focuses on management strategies for better utilization of energy in buildings and industry as well as ways of improving energy efficiency at the end use. Renowned authorities from around the globe share insights and modern points of view on a broad spectrum of topics. Summarizing proven energy efficient technologies in the building sector, the book includes examples that highlight the cost-effectiveness of some of these technologies. It introduces basic methods for designing and sizing cost-effective systems and determining whether it is economically efficient to invest in specific energy efficiency or renewable energy projects. It provides guidance for computing measures of economic performance for relatively simple investment choices and the fundamentals for dealing with complex investment decisions. The book also describes energy audit producers commonly used to improve the energy efficiency of residential and commercial buildings as well as industrial facilities. After developing the basics of HVAC control, the book explores operational needs for successfully maintained operations. It describes the essentials of control systems for heating, ventilating, and air conditioning of buildings designed for energy conserving operation. The book also defines demand-side management, covers its role in integrated resource planning, and delineates the main elements of its programs. The book demonstrates these concepts with case studies of successful demand-side management programs. These features and more provide the tools necessary to improve energy management leading to higher energy efficiencies.

Brought to you by the creator of numerous bestselling handbooks, the Handbook of Energy Efficiency and Renewable Energy provides a thorough grounding in the analytic techniques and technological developments that underpin renewable energy use and environmental protection. The handbook emphasizes the engineering aspects of energy conservation and renewable energy. Taking a world view, the editors discuss key topics underpinning energy efficiency and renewable energy systems. They provide content at the forefront of the contemporary debate about energy and environmental futures. This is vital information for planning a secure energy future. Practical in approach, the book covers technologies currently available or expected to be ready for implementation in the near future. It sets the stage with a survey of current and future world-wide energy issues, then explores energy policies and incentives for conservation and renewable energy, covers economic assessment methods for conservation and generation technologies, and discusses the environmental costs of various energy generation technologies. The book goes on to examine distributed generation and demand side management procedures and gives a perspective on the efficiencies, economics, and environmental costs of fossil and nuclear technologies. Highlighting energy conservation as the cornerstone of a successful national energy strategy, the book covers energy management strategies for industry and buildings, HVAC controls, co-generation, and advances in specific technologies such as motors, lighting, appliances, and heat pumps. It explores energy storage and generation from renewable sources and underlines the role of infrastructure security and risk analysis in planning future energy transmission and storage systems. These features and more make the Handbook of Energy Efficiency and Renewable Energy the tool for designing the energy sources of the future.

The recent development of microscale technologies makes it possible to design complex microsystems devoted to transport, dosing, mixing, analysis or even synthesis of fluids. Applications are numerous and exist in almost every industrial field, from biotechnology and healthcare to aeronautics and advanced materials manufacturing. Microfluidics is a relatively new research area, usually comprising work with microsystems and involving internal fluid flows with characteristic dimensions of the order of one micrometer (1 x 10 -6 m). This book provides engineers and researchers with a range of tools for modeling, experimenting on, and simulating these microflows, as a preliminary step in designing and optimizing fluidic microsystems. The various consequences of miniaturization on the hydrodynamics of gas, liquid or two-phase flows, as well as on associated heat transfer phenonema, are analyzed. The book is illustrated with examples that demonstrate the wide diversity of applications, and the breadth of novel uses of these fluidic microsystems.