This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ôsmaller, better, cheaper, and faster'ö If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

The integration of MOEMS microelement arrays into smart glass for light steering shows promising features and valuable advantages in terms of energy conservation, enhancing lighting conditions, and improving human comfort. This study explores various actuation solutions and concludes that electrostatically actuated MOEMS devices from INA offer rapid actuation speed, minimum energy consumption, long lifetime and high stability.

This text constitutes proceedings from the International Conference on Micro Mechatronics and Human Science, which took place in 1999. Topics covered include microfabrication, microcomponents and microdevices, and measurement and system.

As optical technologies move closer to the core of modern computer architecture, there arise many challenges in building optical capabilities from the network to the motherboard. Rapid advances in integrated optics technologies are making this a reality. However, no comprehensive, up-to-date reference is available to the technologies and principles underlying the field. The Encyclopedic Handbook of Integrated Optics fills this void, collecting the work of 53 leading experts into a compilation of the most important concepts, phenomena, technologies, and terms covering all related fields. This unique book consists of two types of entries: the first is a detailed, full-length description; the other, a concise overview of the topic. Additionally, the coverage can be divided into four broad areas: A survey of the basics of integrated optics, exploring theory, practical concerns, and the fundamentals behind optical devices Focused discussion on devices and components such as arrayed waveguide grating, various types of lasers, optical amplifiers, and optoelectronic devices In-depth examination of subsystems including MEMS, optical pickup, and planar lightwave circuits Finally, systems considerations such as multiplexing, demultiplexing, 3R circuits, transmission, and reception Offering a broad and complete treatment of the field, the Encyclopedic Handbook of Integrated Optics is the complete guide to the fundamentals, principles, and applications of integrated optics technology.